Перегляд за автором "Demchishin, A.V."

Сортувати за: Порядок: Результатів:

  • The flow density of atoms sputtered from a cathode of cylinder magnetron 
    Panchenko, O.A.; Goncharov, A.A.; Demchishin, A.V.; Kostin, E.G.; Pavlov, S.N.; Stetsenko, B.V. (Вопросы атомной науки и техники, 2005)
    The results of calculations of atom flows, sputtered from a cathode of special cylindrical magnetron sputtering system, presented. The atoms flow in cylinder magnetron will be larger with respect to planar magnetron due ...
  • The investigation of the optical spectra in process of magnetron deposition 
    Demchishin, A.V.; Evsyukov, A.N.; Goncharov, A.A.; Kostin, E.G. (Вопросы атомной науки и техники, 2008)
    We describe the state-of-the-art method of monitoring optical parameters the cylindrical gas discharge plasma of magnetron type. An analysis and characterization of the spectrum during a process of titanium nitride deposition ...